SEM, FIB and TEM Contamination Solutions
GV10x DS Asher
The GV10x Downstream Asher’s ability to remove carbon contamination is a major advancement over traditional methods of mitigating contamination using cold trapping, nitrogen purging, and other plasma cleaners. The GV10x, with its extended power and pressure range (5 to 100 Watts and 2 to <0.005 Torr), represents a paradigm shift in the carbon decontamination of SEMs and other vacuum systems. Atomic oxygen and hydrogen eliminates contamination by converting the surface carbon into gas phase molecules which are then pumped out of chambers.
ibss Group, Inc. offers two different controllers to power and operate GV10x plasma sources. The choice between BT Controller and 2U Controller is a laboratory user preference. The ibss GUI software is compatible with both controllers.
The Gentle Asher has been specifically designed to expand the GV10x investment for sample cleaning prior to inserting into the EM chamber. The Gentle Asher Chamber, which is integrated with a GV10x, is ideal for preventing black scan square deposits.
The GVGA is not a plasma cleaner in the traditional sense since the plasma species are not accelerated but downstream with energies ≤ 30ev so ion sputter and specimen topography damage are eliminated. Atomic O2 produced in the GV10x plasma source removing hydrocarbon contamination from samples by chemical interaction that produce CO2, CO & H2O molecules which are then pumped away.
Mobile Cubic Asher (MCA)
A mobile plasma center that cleans, stores and processes SEM/TEM samples/holders and other sundry items in a small chamber. The Qwk-Switch™ Source facilitates shifting hydrocarbon mitigation to other SEM or FIB sites for in-situ chamber cleaning.
The MCA chamber accommodates an assortment of specimens to remove hydrocarbons, hydrophilizing surfaces, storing and cleaning three TEM holders and specimens with ibss signature GV10x Downstream plasma fitted onto a portable S/S cart.
Similar to MCA but distinguished by turbomolecular pressure & speed. An optional optical microscope can be installed to mount and observe specimens during plasma conditioning and potential leak observation from liquid/gas specimen cells. Plasma processing at lower vacuum increases plasma processing activity. To meet requirements of viewing gas and liquid sample cells in TEM holders the Chiaro performs the functions of leak checking, gas/liquid E-Chip viewing while mounting, surface hydrophilization and plasma processing.