New Japan Representative: Apollo wave, Inc.
We wish to announce that henceforth Apollowave will support sales & service for ibss Group in Japan. Apollo wave, Inc. President Jack Yamashita has served the EM and technological marketplace ~25 years.
Newest Research: Remote Plasma Cleaning of Optical Surfaces
An extended study on an advanced method for the cleaning of carbon contaminations from large optical surfaces using a remote inductively coupled low-pressure RF plasma source (GV10x DownStream Asher) is reported. Technical and scientific features of this scaled up cleaning process are analysed, such as the cleaning efficiency for different carbon allotropes (amorphous and diamond-like
Newest Research: Remote Plasma Cleaning of Optical Surfaces Weiterlesen »
GV10x Report
Downstream Asher for In-Situ Specimen and Specimen Chamber Cleaning presentation, showing before/after cleaning images and adjacent area scans. The ibss GV10x cleaner removed nearly all contamination build-up from the wafer surface after a total clean time of 13 minutes. Additionally: Further cleaning may have completely removed the contamination rectangle It was noted that the line-widths
