{"id":4115,"date":"2020-06-08T08:18:32","date_gmt":"2020-06-08T16:18:32","guid":{"rendered":"https:\/\/ibssgroup.com\/applications\/"},"modified":"2020-09-28T18:05:49","modified_gmt":"2020-09-29T02:05:49","slug":"applications","status":"publish","type":"page","link":"https:\/\/ibssgroup.com\/ko\/applications\/","title":{"rendered":"\uc751\uc6a9 \ud504\ub85c\uadf8\ub7a8 \uae30\uc220 \uc751\uc6a9"},"content":{"rendered":"\t\t
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\uc751\uc6a9 \ud504\ub85c\uadf8\ub7a8 \uae30\uc220 \uc751\uc6a9<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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GV10x \uae30\uc220 \uc751\uc6a9<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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GV10x DS Asher\uc758 \ud0c1\uc6d4\ud55c \uc804\uc790\ud604\ubbf8\uacbd \uc2dc\ub8cc \ubc0f \ucc54\ubc84 \ub0b4 \ud0c4\uc18c \uc624\uc5fc \uc81c\uac70 \ub2a5\ub825\uc740 \uc804\uc790\ud604\ubbf8\uacbd \uc0ac\uc6a9\uc790\ub4e4\uc5d0 \uc758\ud574 \uc798 \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4. 1\uc138\ub300 plasma \uc138\ucc99\uae30, LN2<\/span> trapping, N2<\/span> purging\uacfc \uac19\uc740 \uae30\uc874\uc758 \ubc29\uc2dd\uc744 \ub6f0\uc5b4 \ub118\ub294 \ubcf8 \uc81c\ud488\uc758 \uc624\uc5fc \uad00\ub9ac \uac1c\uc120\ucc45\uc740 \ub9ce\uc740 \uc804\uc790\ud604\ubbf8\uacbd \ud1b5\ud55c \uc5f0\uad6c\ub4e4\ub85c \ud558\uc5ec\uae08 \ud0c4\uc18c \uc794\uc5ec\ubb3c\ub4e4\uc744 \uc218 \ubd84 \ub0b4\uc5d0 \uc81c\uac70\ud560 \uc218 \uc788\uac8c \ud574\uc8fc\uba70 \ucc54\ubc84 \ub0b4\ubd80\uc5d0 \uc313\uc778 \uc624\uc5fc\uc744 \uacbd\uac10\ud560 \uc218 \uc788\uac8c \ud574\uc90d\ub2c8\ub2e4. <\/p>\n

\ub6f0\uc5b4\ub09c GV10x\uc758 \uc131\ub2a5\uc740 \uc800\uc555\ub825 \ud50c\ub77c\uc988\ub9c8 \uc0dd\uc131\uc5d0\uc11c \ube44\ub86f\ub429\ub2c8\ub2e4. \uc800\uc18d \ud50c\ub77c\uc988\ub9c8 \uc7ac\uacb0\ud569 \ubc0f \uae34 \ud3c9\uade0\uc790\uc720\ud589\uc815(mean free path)\uc740 \ucc54\ubc84 \uc804\ubc18\uc5d0 \uac78\uccd0 \ubc1d\uc740 UV\ub97c \ubc1c\uc0b0\ud569\ub2c8\ub2e4. \ud655\uc7a5\ub41c \ucd9c\ub825 \ubc94\uc704\uc640 \ub9de\ubb3c\ub9b0 \ud654\ud559 \ubc18\uc751\uc774 \ud45c\uba74\uc5d0 \ub204\uc801\ub41c \ud0c4\uc18c\ub97c \uae30\uccb4 \ub2e8\uacc4\ub85c \ubc14\uafb8\uc5b4, \ub2e8\uc21c\ud788 \ud45c\uba74\uc5d0 \uac00\ub450\ub294 \uac83\uc774 \uc544\ub2cc \ucc54\ubc84 \ubc16\uc73c\ub85c \uc9c1\uc811 \ubc30\ucd9c\ud569\ub2c8\ub2e4.<\/p>\n

A\uc624\uc5fc \uc218\uc900 \ubc0f \uc7a5\ube44\uc758 \uc885\ub958\uc5d0 \ub530\ub77c \uc138\ucc99 \uc2dc\uac04\uc5d0 \ucc28\uc774\ub294 \uc874\uc7ac\ud558\ub098, \ud6a8\uc728\uc801\uc778 GV10x DS Asher\ub294 \ub2e4\uc218\uc758 \uc804\uc790\ud604\ubbf8\uacbd\ub4e4\uc758 \uc624\uc5fc\uc81c\uac70\ub97c \uc704\ud574 \uc7a5\ube44 \uac04 \uc774\ub3d9\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4. Qwk-Switch\u2122 \ubc0f QSTM \ub9c8\uc6b4\ud305\uc774 GV10x Source\uc758 \uc7a5\ube44 \uac04 \uc774\ub3d9\uc5d0 \ub3c4\uc6c0\uc744 \uc90d\ub2c8\ub2e4. <\/p>\n

\ub098\ub178\uacfc\ud559\uc758 \ubc1c\uc804\uc5d0 \ub530\ub77c, \uc804\uc790 \ube54\ub4e4\uc740 \ub354\uc6b1 \uc9d1\uc911\ub3c4\uac00 \uc0c1\uc2b9\ud558\uace0, \uc5d0\ub108\uc9c0\ub294 \ub0ae\uc544\uc9c0\uace0 \uc788\uc73c\uba70, \uc804\uad6c\uccb4 \uae30\uccb4\ub4e4\uc758 \uc0ac\uc6a9\uc740 \ub354\uc6b1 \ube48\ubc88\ud574\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \ub0ae\uc740 \uac00\uc18d\uc804\uc555\uc5d0\uc11c\uc758 \uace0\ud574\uc0c1\ub3c4 \uc774\ubbf8\uc9c0\ub294 \ub0ae\uc740 \uc218\uc900\uc758 \ud0c4\uc18c\uc624\uc5fc\uc5d0 \ub2ec\ub824 \uc788\uc2b5\ub2c8\ub2e4. The Asher downstream plasma \ucc98\ub9ac\uacfc\uc815\uc740 \uc791\uc5c5\uc744 \ube60\ub974\uac8c \uc644\ub8cc\ud558\uc5ec \uc0ac\uc6a9\uc790\uc758 \uadc0\uc911\ud55c \uc2dc\uac04\uc744 \uc544\uaef4\uc90d\ub2c8\ub2e4. \uae30\uc874\uc758 \u2018\ud50c\ub77c\uc988\ub9c8 \uc138\ucc99\uae30\u2019\uc5d0 \uc0ac\uc6a9\ub418\uc5c8\ub358 kinetic sputter etch \uc138\ucc99\uacfc\ub294 \ub2ec\ub9ac, downstream plasma \uacfc\uc815\uc740 \ubd80\ub4dc\ub7ec\uc6b4 \ud654\ud559\uc801 etch\uc785\ub2c8\ub2e4. \uc774 \ucc98\ub9ac\uacfc\uc815\uc740 \uc9c4\uacf5\ud658\uacbd \ub0b4 \ud0c4\uc18c \ubc0f \ud0c4\ud654\uc218\uc18c \uc624\uc5fc \uc81c\uac70 \ubc29\uc2dd\uc758 \ud601\uba85\uc744 \ubd88\ub7ec\uc654\uc2b5\ub2c8\ub2e4.<\/p>\n

SEM, FIB and TEM Applications<\/strong><\/p>\n

\ud50c\ub77c\uc988\ub9c8 \uc138\ucc99\uc740 \uc544\uc6c3\uac00\uc2f1(outgassing) \ubb3c\uc9c8\uc744 \ubc1c\uacac\ud588\uc744 \ub54c, \uc804\uc790\ud604\ubbf8\uacbd \uc2dc\ub8cc \uc900\ube44\uc5d0 \uc788\uc5b4 \uac00\uc7a5 \ube44\uce68\ud22c\uc801\uc774\uace0 \ud6a8\uc728\uc801\uc778 \ubc29\ubc95\uc785\ub2c8\ub2e4. \ud50c\ub77c\uc988\ub9c8 \uc138\ucc99 \uacfc\uc815\uc774 \ud0c4\ud654\uc218\uc18c \uc624\uc5fc\uce35\uc744 \uc81c\uac70\ud568\uc5d0 \ub530\ub77c, \ud0c4\uc18c \uad6c\uc870\ubb3c\uc744 \uc81c\uac70\ud560 \uc218\ub3c4 \uc788\ub294\ub370, \uc774\ub294 \uc138\ucc99 \uacfc\uc815\uc774 \ub05d\ub09c \ud6c4 \ud0c4\uc18c \uc9c0\uc9c0 \uadf8\ub9ac\ub4dc\uac00 \uc57d\ud574\uc9c0\uac8c \ub9cc\ub4e4\uc5b4 \ucd94\ud6c4 TEM \uc5b4\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ubb38\uc81c\uac00 \ub418\uae30\ub3c4 \ud569\ub2c8\ub2e4. ibss\ub294 \uc774\ub97c \uc704\ud574 \ud50c\ub77c\uc988\ub9c8\uc640 \ud45c\ubcf8 \uac04 \uc0c1\ud638 \uc791\uc6a9\uc758 \ubd80\uc791\uc6a9\uc744 \ucd5c\uc18c\ud654\ud55c, \uc6b4\ub3d9\uc5d0\ub108\uc9c0\uc758 \uc601\ud5a5\uc774 \uc5c6\ub294 \uc548\uc804\ud55c \uba54\ucee4\ub2c8\uc998\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ubc18\ubcf5\ub41c \uc138\ucc99 \uacfc\uc815 \uc774\ud6c4\uc5d0\ub3c4 \ud0c4\uc18c \uc9c0\uc9c0 \ud544\ub984\uc740 \ubcf4\uc874\ud55c \ucc44, \ud6a8\uacfc\uc801\uc73c\ub85c \uc624\uc5fc\uc744 \uc81c\uacf5\ud558\ub294 \uacb0\uacfc\ub97c \uc120\uc0ac\ud569\ub2c8\ub2e4.<\/p>\n

\uc800\ub110 \uc804\ubb38\uc744 \uc77d\uc73c\ub824\uba74 \uc5ec\uae30\ub97c \ud074\ub9ad<\/a>\ud558\uc138\uc694.<\/strong><\/p>\n

Load Lock<\/strong><\/p>\n

\ub85c\ub4dc\ub77d \ub0b4 \uc2dc\ub8cc \uc138\ucc99\uc740 Qwk-Switch mounting\uacfc \ub85c\ub4dc\ub77d \ub0b4\ubd80 \uc138\ucc99 \ubc0f \uc2dc\ub8cc \uc0bd\uc785\uc744 \uc790\ub3d9\ud654\ud558\ub294 \uc18c\ud504\ud2b8\uc6e8\uc5b4\ub97c \ud1b5\ud574 \uc774\ub8e8\uc5b4\uc9d1\ub2c8\ub2e4. \ub85c\ub4dc\ub77d\uc758 \uc0ac\uc804 \uc138\ucc99\uc740 \ucc54\ubc84 \uc624\uc5fc\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \ucc54\ubc84 \uc138\ucc99\uc744 \uc904\uc5ec\uc90d\ub2c8\ub2e4. \ub85c\ub4dc\ub77d \uc138\ucc99 \ub3d9\uc548, \ucc54\ubc84\uc138\ucc99\uc744 \uc704\ud574 \ub85c\ub4dc\ub77d \ub3c4\uc5b4\ub97c \uc5f4\uc5b4\ub454 \ucc44\ub85c \ub458 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4. \ub85c\ub4dc \ub77d\uc5d0 \ub300\ud55c \ud50c\ub77c\uc988\ub9c8 \ud06c\ub9ac\ub108 \uad6c\uc131 \ubb38\uc758\ub294 ibss\ub85c \uc5f0\ub77d\uc8fc\uc2dc\uae30 \ubc14\ub78d\ub2c8\ub2e4. <\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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UniAlberta GV10x on Gemini<\/div><\/div><\/div><\/div>
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GV10x on S4500 Sigmatech Amkor<\/div><\/div><\/div><\/div>
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GV10x On Hitachi S4800<\/div><\/div><\/div><\/div>
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GV10x on XPS<\/div><\/div><\/div><\/div>
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GV10x on XB540<\/div><\/div><\/div><\/div>
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Jeol JSM 7200 LoadLock<\/div><\/div><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t
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GV10x \uae30\uc220 \uc751\uc6a9 GV10x DS Asher\uc758 \ud0c1\uc6d4\ud55c \uc804\uc790\ud604\ubbf8\uacbd \uc2dc\ub8cc \ubc0f \ucc54\ubc84 \ub0b4 \ud0c4\uc18c \uc624\uc5fc \uc81c\uac70 \ub2a5\ub825\uc740 \uc804\uc790\ud604\ubbf8\uacbd \uc0ac\uc6a9\uc790\ub4e4\uc5d0 \uc758\ud574 \uc798 \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4. 1\uc138\ub300 plasma \uc138\ucc99\uae30, LN2 trapping, N2 purging\uacfc \uac19\uc740 \uae30\uc874\uc758 \ubc29\uc2dd\uc744 \ub6f0\uc5b4 \ub118\ub294 \ubcf8 \uc81c\ud488\uc758 \uc624\uc5fc \uad00\ub9ac \uac1c\uc120\ucc45\uc740 \ub9ce\uc740 \uc804\uc790\ud604\ubbf8\uacbd \ud1b5\ud55c \uc5f0\uad6c\ub4e4\ub85c \ud558\uc5ec\uae08 \ud0c4\uc18c \uc794\uc5ec\ubb3c\ub4e4\uc744 \uc218 \ubd84 \ub0b4\uc5d0 \uc81c\uac70\ud560 \uc218 \uc788\uac8c \ud574\uc8fc\uba70 \ucc54\ubc84 \ub0b4\ubd80\uc5d0 […]<\/p>\n","protected":false},"author":11,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","_exactmetrics_skip_tracking":false,"_exactmetrics_sitenote_active":false,"_exactmetrics_sitenote_note":"","_exactmetrics_sitenote_category":0,"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"full-width-container","site-content-style":"unboxed","site-sidebar-style":"unboxed","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"class_list":["post-4115","page","type-page","status-publish","hentry"],"acf":[],"uagb_featured_image_src":{"full":false,"thumbnail":false,"medium":false,"medium_large":false,"large":false,"1536x1536":false,"2048x2048":false,"widget-thumbnail":false,"gform-image-choice-sm":false,"gform-image-choice-md":false,"gform-image-choice-lg":false},"uagb_author_info":{"display_name":"Ron Snow","author_link":"https:\/\/ibssgroup.com\/ko\/author\/developer\/"},"uagb_comment_info":0,"uagb_excerpt":"GV10x \uae30\uc220 \uc751\uc6a9 GV10x DS Asher\uc758 \ud0c1\uc6d4\ud55c \uc804\uc790\ud604\ubbf8\uacbd \uc2dc\ub8cc \ubc0f \ucc54\ubc84 \ub0b4 \ud0c4\uc18c \uc624\uc5fc \uc81c\uac70 \ub2a5\ub825\uc740 \uc804\uc790\ud604\ubbf8\uacbd \uc0ac\uc6a9\uc790\ub4e4\uc5d0 \uc758\ud574 \uc798 \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4. 1\uc138\ub300 plasma \uc138\ucc99\uae30, LN2 trapping, N2 purging\uacfc \uac19\uc740 \uae30\uc874\uc758 \ubc29\uc2dd\uc744 \ub6f0\uc5b4 \ub118\ub294 \ubcf8 \uc81c\ud488\uc758 \uc624\uc5fc \uad00\ub9ac \uac1c\uc120\ucc45\uc740 \ub9ce\uc740 \uc804\uc790\ud604\ubbf8\uacbd \ud1b5\ud55c \uc5f0\uad6c\ub4e4\ub85c \ud558\uc5ec\uae08 \ud0c4\uc18c \uc794\uc5ec\ubb3c\ub4e4\uc744 \uc218 \ubd84 \ub0b4\uc5d0 \uc81c\uac70\ud560 \uc218 \uc788\uac8c \ud574\uc8fc\uba70 \ucc54\ubc84 \ub0b4\ubd80\uc5d0…","_links":{"self":[{"href":"https:\/\/ibssgroup.com\/ko\/wp-json\/wp\/v2\/pages\/4115","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/ibssgroup.com\/ko\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/ibssgroup.com\/ko\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/ibssgroup.com\/ko\/wp-json\/wp\/v2\/users\/11"}],"replies":[{"embeddable":true,"href":"https:\/\/ibssgroup.com\/ko\/wp-json\/wp\/v2\/comments?post=4115"}],"version-history":[{"count":0,"href":"https:\/\/ibssgroup.com\/ko\/wp-json\/wp\/v2\/pages\/4115\/revisions"}],"wp:attachment":[{"href":"https:\/\/ibssgroup.com\/ko\/wp-json\/wp\/v2\/media?parent=4115"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}