{"id":971,"date":"2015-08-14T22:54:29","date_gmt":"2015-08-14T22:54:29","guid":{"rendered":"\/?p=971"},"modified":"2024-07-04T11:06:39","modified_gmt":"2024-07-04T19:06:39","slug":"gv10x-report","status":"publish","type":"post","link":"https:\/\/ibssgroup.com\/ja\/gv10x-report\/","title":{"rendered":"GV10x Report"},"content":{"rendered":"<p>Downstream Asher for In-Situ Specimen and Specimen Chamber Cleaning presentation, showing before\/after cleaning images and adjacent area scans.<\/p>\n<p>The ibss GV10x cleaner removed nearly all contamination build-up from the<br \/>\nwafer surface after a total clean time of 13 minutes. Additionally:<\/p>\n<ul>\n<li>Further cleaning may have completely removed the contamination rectangle<\/li>\n<li>It was noted that the line-widths before cleaning were significantly larger from the contamination build-up, but reduced back to the original line width after cleaning<\/li>\n<li>The ibss GV10x cleaner cleaned the surface of the wafer (prior to imaging) and did not show signs of contamination build-up<\/li>\n<li>The ibss GV10x cleaner was fast, simple to use and did not require any modifications to the vacuum system<\/li>\n<li>Further testing can be done to tune the rate of contamination removal and the affects of time, wattage and chamber vacuum conditions on various types of samples and applications<\/li>\n<\/ul>\n<p><a href=\"\/wp-content\/uploads\/2015\/08\/Downstream-Asher-for-In-Situ-Specimen-and-Specimen-Chamber-Cleaning.pdf\" target=\"_blank\" rel=\"noopener\"><i class=\"fa fa-download\"><\/i> Download<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Downstream Asher for In-Situ Specimen and Specimen Chamber Cleaning presentation, showing before\/after cleanin [&hellip;]<\/p>\n","protected":false},"author":55,"featured_media":1081,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_uag_custom_page_level_css":"","_exactmetrics_skip_tracking":false,"_exactmetrics_sitenote_active":false,"_exactmetrics_sitenote_note":"","_exactmetrics_sitenote_category":0,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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