GV10xCF (ConFlat) DS Asher consists of a patented Plasma Source suitable for hydrogen cleaning, operating parameters power & pressure are continuously adjustable – from 10 to 99 Watts & 2.0 Torr to <5 mTorr. P3 Dimensions: H 6.18” W 3.1” D 8.76”, Weight: 4lbs., shutoff leakage rate 1E-8 Torr l/s, 1.3E-9 Pa-m3/s.
GV10x Controller: 13.56 MHz RF generator, Remote Control Operation via Com Port settings 9600,8,N,1,N w/ Retentive Menus, On/Off, Time, Tuning Voltage, Power requirements 100-230 VAC 50/60 Hz, power consumption 500VA, Impedance 50 Ohms, Bench Top Dimensions: H 6.75" W 8” D 17", Weight: 16 lbs., 2U Dimensions: H 3.5” W 17” D 14.5”, Weight: 17lbs.
From the GUI or front panel Controller, the operator may: set, monitor and change operating power from 10 to 99 Watts during a run. A pressure range from 2 Torr to <5 mTorr is selectable from the Source mounted Variable Constriction. The GV10x wide pressure range allows hydrocarbon removal at TMP speeds without danger to the TMP or interruption of system interlock software.